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| 3 | Luminescence properties of submicron features fabricated by using magnetron reactive ion etching with different sample biases |
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Applied Physics Letters Vol.67, pp3833-3835 (1995)
M. Freiler, G.F. McLane, S. Kim, M. Levy, R. Scarmozzino, I.P. Herman, R.M. Osgood, Jr.
